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Materials : Silicon carbide (SiC)

Silicon carbide can be made in different chemical compositions. It can be found either as lower purity grades mostly used for thermal applications or high-purity grades (sintered SiC and CVD SiC) that makes silicon carbide an advanced ceramic with exceptionnal mechanical and thermal properties.

Selection of materials

Microcertec offers two high-purity silicon carbide grades that are particularly suited for hostile environments :

  • sintered silicon carbide
  • CVD silicon carbide

Both SiC materials are mainly designed to be used in thermal-mechanical or corrosion-resistance applications because they show an outstanding behaviour to resist to wear, thermal shocks and corrosion (liquids and gases). Moreover, these pure SiC grades offer a high thermal conductivity, in the range of 120 to 160 W/m.K for sintered silicon carbide and 250 W/m.K for CVD SiC.

Properties

Sintered silicon carbide and CVC SiC have the following properties :

  • low density
  • excellent thermal shock resistance
  • excellent wear resistance
  • excellent corrosion resistance (liquids and gas)
  • low coefficient of thermal expansion
  • high thermal conductivity
  • electrical conductivity

Our typical applications

Sintered silicon carbide is a ceramic material widely used in the following applications :

  • tube and ring faces for mechanical seals
  • pump and valve components
  • wafer end-effectors and chuck or heat plates for semicon processing equipment

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Material properties datasheet : ceramics and quartzMaterial properties datasheet : ceramics and quartz (1472 Ko)